ROKITECHNO | Filter cartridge & Filter system
- Home
- Product and service guide
- Ozone generator & Ozone system lineup
Semi-conductor/fine chemical FA type series
Structure, features
Our FA type ozone generators adopt the quartz glass double tube system for their discharge section. Since there is no metal component, the ozone gas discharged is so clean that it is below the lower limit measured by an analyzer.
Heavy metal ion analysis data (when ozone concentration is 200g/m (N))
| Element | Al | Ti | Cr | Mn | Fe | Co | Ni | Cu | Zn |
|---|---|---|---|---|---|---|---|---|---|
| Measured value | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 |
- Analysis maker ICP-MS detectable lower limit 1.0ng/m3
Ozone generator BA series air specifications
Structure, features
Ozone generators of water-cooling type using air as the raw material gas, designed for general industrial use. Highly reliable thanks to the high grade discharge tube adopted. The protection system has been strengthened by adopting an LCD touch panel in addition to various alarm systems. Remote operation and interaction with an optional concentration meter, etc. makes the feedback control possible.
| Ozone quantity generated | ６０～９６０ ｇ／Ｈｒ |
|---|---|
| Ozone gas concentration | ２５～４５ ｇ／Ｎｍ3 |
Ozone generator BX series oxygen specifications
Structure, features
Water-cooling ozone generators based on the BA type but using oxygen as the raw material gas. By using oxygen as the raw material gas, the concentration of the ozone generated is twice the BA type of the same size.
| Ozone quantity generated | ２８０～１９２０ ｇ／Ｈｒ |
|---|---|
| Ozone gas concentration | ５０～１２０ ｇ／Ｎｍ3 |
Ozone generator FAS series
Structure, features
Capable of supplying high concentration ozone gas such as 180g/Nm3 using oxygen gas as the raw material gas. Ozone generators of water-cooling type adopting a small quartz double tube.
Ozone generator ZR series
Structure, features
Ozone generators of air-cooling type having a ceramic plane discharge section. Capable of supplying ozone gas as much as 0.3 to 6g/Hr using oxygen gas as the raw material gas.
Ozone water production system for general industry, ZW series
(Ozex water)
Structure, features
Gas dissolution component is incorporated into the ozone gas generator to produce ozone water. The units are combined according to the required ozone water concentration (1 to 20ppm) and the ozone water flow rate. The dissolution method is selected from ejector, gas dissolution pump, gas dissolution film, etc. according to the specifications required.
| Ozone water concentration | 1 – 20ppm |
|---|---|
| Ozone water flow rate | 5 – 200 L/min |
Ozone water production system for semiconductor industry, FZW series
(Ozex water)
Structure, features
By dissolving clean ozone gas generated by the quartz double tube into ultra pure water, clean ozone water is made. To dissolve the ozone gas, an ejector (up to 20ppm) or gas dissolution film (20ppm or more) is used.
| Ozone water concentration | 5 – 90ppm |
|---|---|
| Ozone water flow rate | 2 – 20 L/min |
Ozone concentration meter ZM-Ozone monitor
Structure, features
The ozone concentration meter of an ultraviolet absorption system, with dual range function which automatically changes between the low concentration and the high concentration. It is small and capable of measurement of low concentration. Zero adjustment and span adjustment are also easy.
| Model | ＺＭ-20/200 ＺＭ-30/300 |
|---|---|
| Measurement range | 0-20, 0-200ｇ/Nm3 0-30,0-300ｇ/Nm3 |
| Dimensions | Ｗ２９０×Ｈ１４０×Ｄ２８０ |
| Weight | ５kg |
This system decomposes the ozone gas and discharges it as oxygen gas. It doesn’t use electricity, etc. because it uses ozone decomposition catalyst or active charcoal. It is designed according to the concentration and air flow rate of the ozone gas discharged. The ozone gas of concentration 200g/Nm3 or less is made 0.1ppm and discharged.
We provide maintenance, overhaul and modification service not only for ozone generators made by ROKI but also for those made by former Japan Ozone Co., Ltd. We also started to provide maintenance service for ozone generators made by Japan Electronic Materials Corp. Please feel free to contact us for more information.
Ozone deodorization can be used as an effective way of deodorization. We propose a total deodorization plant using the ozone according to customer’s conditions. Our proposal covers from planning of the plant, production of vessel to construction of ducts.
In addition to the deodorization systems above, we also provide designing and production of various ozone systems including depolarization of waste water and ozonization of factory water. Please feel free to contact us for more information.
