ROKITECHNO | Filter cartridge & Filter system
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- Product and service guide
- Ozone generator & Ozone system lineup
- Main example of ozone use
| Application | Use | Ozone phase | ROKI TECHNO applicable products |
|---|---|---|---|
| Semiconductr | Wafer washing | Gas phase, ozone + H2SO4 | FA |
| Liquid phase | DW | ||
| Film formation | Gas phase | FA | |
| Photo resist removal | Gas phase, ozone + UV | FA | |
| Pure water regeneration | Gas phase | FA | |
| Sterilization of water (aseptic filtration) | Gas phase | FA,BA,BX | |
| 15. Water treatment (waste water treatment) | waste water treatment | Gas phase | BA |
| 17. Waste water recycling | Gas phase | FA,BA | |
| 18. decomposition of organic matters in plating waste water | Gas phase, ozone + UV | ZR,FA,BA | |
| 19. Dye waste water | Gas phase | BX | |
| Others | 21. Film surface reforming laminator | Gas phase | BA |
| Decomposition of exhaust gas (deodorization) | Gas phase | BX |
